@article { author = {Najafi, S and Dowlati, S and Rezazadeh, G and Azizi, S}, title = {Quality Factor of Free In-plane Vibration of a Fully Clamped Rectangular Micro-plate}, journal = {International Journal of Engineering}, volume = {31}, number = {1}, pages = {96-103}, year = {2018}, publisher = {Materials and Energy Research Center}, issn = {1025-2495}, eissn = {1735-9244}, doi = {}, abstract = {Thermo-elastic damping is a significant dissipation mechanism in high quality factor microstructures. In this paper, thermo-elastic damping of the in-plane vibration of fully clamped rectangular micro-plates has been studied. The governing equation of the micro-plate motion and heat conduction equation were derived. Then, The Galerkin method has been used to solve the coupled heat-displacement equations. Eventually, considering the micro-plate of various materials, the effects of geometrical parameters including the length and width of micro-plate and also ambient temperature on the thermo-elastic damping quality factor have been investigated.}, keywords = {In,plane vibration,thermo,elastic damping,Quality factor,Rectangular micro,Plate}, url = {https://www.ije.ir/article_73097.html}, eprint = {https://www.ije.ir/article_73097_d9306c2844324f19d2c4950a51b8c218.pdf} }